ThermoChuck®
TP0315 A/B
Thermal Inducing Vacuum Platform




Model TP0315A

Standard Temperature Range:
+30°C to +200°C

Extended Temperature Range:
+30°C to +300°C


Model TP0315B

Standard Temperature Range:
0°C to +200°C

Extended Temperature Range:
0°C to +300°C


Chuck Diameters:

5 inch (129mm), 6 inch (154 mm) and 8 inch (203 mm) chucks available to accommodate wafers up to 200mm in diameter.


Chuck Surfaces:

Choice of gold-plated or nickel-plated is standard (Other surface treatments are optional.)

Outstanding Features:

• Excellent Temperature Uniformity ( ± 0.5°C or ± 0.5% ) of the chuck temperature over the entire temperature range
• Temperature Accuracy: ± 0.3°C when calibrated against primary or transfer std.
• Excellent Temperature Stability ( ± 0.1°C) and Control
• Good Electrical Isolation: 1 gigohm @ 500 VDC between surface and ground
• Low Noise DC Control system
• Excellent System and Chuck Reliability
• Extended Programming Option: Set ramp rate, soak time and number of cycles for temperature cycling.

Standard Features:

• 5 temperature set points; "At Temperature" Windows programmable from front panel or via remote control.
• IEEE-488 interface for remote operation
• Interfaces to most major probing stations, laser trimmers and inspection stations
• 4 digit LED display

Applications:

• Steady State or Thermal Cycling of wafers, ICs and hybrids from 0° to +300°C
• Low Noise Thermal Testing applications
• High Isolation and guarded configuration is available for most applications
• Thermal testing applications requiring low electrical noise.
• C-V Plotting, Accelerated Life Test
• Testing devices from 0° to +150°C using ThermoSocket/PCB Assembly
• Design verification and fault isolation.

See the TP0315 ThermoChuck Datasheet

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